Perfluoroether rubber (FFKM) is a high-performance sealing material, whose excellent performance has led to its application throughout the entire manufacturing system of semiconductor products. FFKM seal is one of the main consumables required for the production of integrated circuits.

Main performance characteristics of FFKM:

1) Physical properties

FFKM has a density of 1.9-2.0g/cm ³, Its physical and mechanical properties are similar to those of fluororubber, and its high-temperature compression set resistance is superior to that of fluororubber.

2) Chemical resistance

Similar to PTFE, FFKM is not affected by any medium except certain high fluorocarbon solvents, and is resistant to more than 1600 chemical solvents such as strong acids, strong bases, organic solvents, ultra-high temperature steam, ethers, ketones, esters, nitrogenous compounds, hydrogen carbides, alcohols, aldehydes, furans, and amine compounds.

3) It is resistant to high and low temperatures, and its operating temperature is generally 260~290 ℃. It can be intermittently used for high temperatures of 316 ℃.

4) High temperature vapor resistance

5) Low release and precipitation

6) Plasma resistance, which exhibits high cleanliness and low precipitation characteristics in a plasma environment, and can withstand plasma impact for a long time.

Semiconductor Applications of FFKM

In semiconductor manufacturing, the reliability of elastomeric gaskets is crucial, and the cost of replacing gaskets when production is discontinued is extremely high. In order to avoid potential risks, the requirements for cleanliness and purity of the seals are very strict. At the same time, the seals must be able to work under the pressure of high vacuum and corrosive chemical gases and in high-temperature environments for a long time.

FFKM is a costly raw material and is often used for demanding sealing requirements that other rubbers cannot meet, such as semiconductor manufacturing. FFKM is resistant to plasma corrosion, gas corrosion, acid and alkali corrosion, high temperature corrosion, and high cleanliness requirements for rubber seals, helping to maintain seal integrity, reduce maintenance times, and improve safety. It is the best sealing material for semiconductor manufacturing.