JST KALFLUO 8520 is a kind of FFKM material which is specially cured for very high performance applications, with high purity, good chemical resistance and heat stability properties. It is mainly used for semiconductor manufacturing applications, which is an ideal sealing material for most dry (plasma etching, PECVD, LPCVD, metal CVD, PVD, ALD, plasma cleans) and wet semiconductor processes (wafer cleaning, polymer removal, wet etching, polishing).

It is suitable for applications at temperatures ranging from –10°C to 300°C.

Physical properties of KALFLUO 8520:

Fluid resistance properties of KALFLUO 8520:

Metallic element detection (Solvent immersion) of Kalfluo 8520:

Detection of metal element precipitation in 18M Ω UPDI water at 80 ℃ for 720 hours, parts per billion (ppb, ug/L) ICP-MS-MS)

Test result:

Remarks: 1- Detection limit value: 1ppb; 2- ND=Not detected.