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JST KALFLUO 8520 is a kind of FFKM material which is specially cured for very high performance applications, with high purity, good chemical resistance and heat stability properties. It is mainly used for semiconductor manufacturing applications, which is an ideal sealing material for most dry (plasma etching, PECVD, LPCVD, metal CVD, PVD, ALD, plasma cleans) and wet semiconductor processes (wafer...
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